Laser gas assisted texturing of silicon wafer surface is carried out. Morphological and metallurgical changes in the treated layer are examined using the analytical tools. Microhardness and fracture toughness of the laser treated surface are measured using the indentation technique while residual stress formed is determined from the X-ray diffraction data. The hydrophobicity of the textured surfaces are assessed incorporating the contact angle data and compared with those of as received workpiece surfaces. Environmental dust accumulation and mud formation, due to air humidity, at the laser treated and as received workpiece surfaces are simulated and the effect of the mud residues on the properties of the laser treated surface are studied. The adhesion work due to the presence of the mud on the laser treated surface is also measured. It is found that laser textured surface composes of micro/nano poles and fibers, which in turn improves the surface hydrophobicity significantly. In addition, formation of nitride species contributes to microhardness increase and enhancement of surface hydrophobicity due to their low surface energy. The mud residues do not influence the fracture toughness and microhardness of the laser textured surface; however, they reduced the surface hydrophobicity significantly.

Paper: B.S. Yilbas, H. Ali, M. Khaled, N. Al-Aqeeli, N. Abu-Dheir, K.K. VaranasiApplied Surface Science

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